Intracellular Neuronal Recording with High Aspect Ratio MEMS Probes

Micro-machined silicon needles capable of penetrating through cell membranes were fabricated and tested for intracellular sensing applications. The fabricated needles have sharp tips (diameter <1 μm), they are long (>300 μm) and exhibit high mechanical strength. The needles were tested for extraand intra-cellular neuronal recording applications. To prepare the needles for neuronal recording, they were coated with metal and their shanks insulated. Using these needles, we were able to obtain extremely localized extracellular signals and to perform first recordings with silicon based microprobes from the inside of neurons.